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immediate downloadReleased: 2023-10-20
23/30481371 DC
BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices Part 4. Generic specification for MEMS
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Standard number: | 23/30481371 DC |
Pages: | 21 |
Released: | 2023-10-20 |
Status: | Draft for Comment |
DESCRIPTION
23/30481371 DC
This standard 23/30481371 DC BS EN IEC 62047-4 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices