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Homepage>BS Standards>31 ELECTRONICS>31.080 Semiconductor devices>24/30486622 DC BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices Part 49. Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever
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24/30486622 DC BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices Part 49. Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

24/30486622 DC

BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices Part 49. Reliability test methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever

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Standard number:24/30486622 DC
Pages:11
Released:2024-02-01
Status:Draft for Comment
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24/30486622 DC


This standard 24/30486622 DC BS EN IEC 62047-49. Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080 Semiconductor devices
  • 31.080.99 Other semiconductor devices