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immediate downloadReleased: 2024-07-12
24/30497109 DC
BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Part 5. Test method for defects using X-ray topography
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Standard number: | 24/30497109 DC |
Pages: | 32 |
Released: | 2024-07-12 |
Status: | Draft for Comment |
DESCRIPTION
24/30497109 DC
This standard 24/30497109 DC BS EN IEC 63068-5 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices