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immediate downloadReleased: 2024-07-12
24/30497113 DC
BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment Part 1. Transmittance evaluation method of EUV pellicle
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| Standard number: | 24/30497113 DC |
| Pages: | 16 |
| Released: | 2024-07-12 |
| Status: | Draft for Comment |
DESCRIPTION
24/30497113 DC
This standard 24/30497113 DC BS EN IEC 63567-1 Semiconductor devices. Performance evaluation of semiconductor processing components and inspection equipment is classified in these ICS categories:
- 31.080.99 Other semiconductor devices