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Homepage>BS Standards>13 ENVIRONMENT. HEALTH PROTECTION. SAFETY>13.110 Safety of machinery>BS EN 60204-33:2011 Safety of machinery. Electrical equipment of machines Requirements for semiconductor fabrication equipment
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immediate downloadReleased: 2011-08-31
BS EN 60204-33:2011 Safety of machinery. Electrical equipment of machines Requirements for semiconductor fabrication equipment

BS EN 60204-33:2011

Safety of machinery. Electrical equipment of machines Requirements for semiconductor fabrication equipment

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Standard number:BS EN 60204-33:2011
Pages:130
Released:2011-08-31
ISBN:978 0 580 57313 2
Status:Standard
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BS EN 60204-33:2011


This standard BS EN 60204-33:2011 Safety of machinery. Electrical equipment of machines is classified in these ICS categories:
  • 29.020 Electrical engineering in general
  • 25.040.30 Industrial robots. Manipulators
  • 13.110 Safety of machinery
IEC 60204-33:2009 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors. It is applicable to the electrical equipment or parts of the electrical equipment that operate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) and not exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies not exceeding 200 Hz. For higher voltages or frequencies, special requirements IEC 60204 applies to electrical and electronic equipment associated with semiconductor fabrication equipment for the manufacture, measurement, assembly, and test of semiconductors.