Semiconductor devices. Micro-electromechanical devices Terms and definitions
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Standard number:
BS EN 62047-1:2016
Pages:
38
Released:
2016-04-30
ISBN:
978 0 580 84971 8
Status:
Standard
DESCRIPTION
BS EN 62047-1:2016
This standard BS EN 62047-1:2016 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
31.080.99 Other semiconductor devices
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.
