BS EN 62047-11:2013

Semiconductor devices. Micro-electromechanical devices Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems

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Standard number:	BS EN 62047-11:2013
Pages:	24
Released:	2013-10-31
ISBN:	978 0 580 69448 6
Status:	Standard

DESCRIPTION

BS EN 62047-11:2013

This standard BS EN 62047-11:2013 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:

31.080.99 Other semiconductor devices

IEC 62047-11:2013 specifies the test method to measure the linear thermal expansion coefficients (CLTE) of thin free-standing solid (metallic, ceramic, polymeric, etc.) micro-electro-mechanical system (MEMS) materials with length between 0,1 mm and 1 mm and width between 10 micrometre and 1 mm and thickness between 0,1 micrometre and 1 mm, which are main structural materials used for MEMS, micromachines and others. This test method is applicable for the CLTE measurement in the temperature range from room temperature to 30 % of a material's melting temperature.

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