This standard BS EN 62047-20:2014 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
31.080.99 Other semiconductor devices
IEC 62047-20:2014 specifies terms and definitions, ratings and characteristics, and measuring methods of gyroscopes. Gyroscopes are primarily used for consumer, general industries and aerospace applications. MEMS and semiconductor lasers are widely used for device technology of gyroscopes.
