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Homepage>BS Standards>31 ELECTRONICS>31.080 Semiconductor devices>31.080.99 Other semiconductor devices>BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
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immediate downloadReleased: 2014-10-31
BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

BS EN 62047-21:2014

Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials

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Standard number:BS EN 62047-21:2014
Pages:18
Released:2014-10-31
ISBN:978 0 580 77554 3
Status:Standard
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BS EN 62047-21:2014


This standard BS EN 62047-21:2014 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
  • 31.080.99 Other semiconductor devices

This part of IEC 62047 specifies the determination of Poisson's ratio from the test results obtained by the application of uniaxial and biaxial loads to thin-film micro-electromechanical systems (MEMS) materials with lengths and widths less than 10 mm and thicknesses less than 10 μm.


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