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immediate downloadReleased: 2013-10-31
BS EN ISO 25178-603:2013
Geometrical product specifications (GPS). Surface texture: Areal Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
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Standard number: | BS EN ISO 25178-603:2013 |
Pages: | 40 |
Released: | 2013-10-31 |
ISBN: | 978 0 580 82360 2 |
Status: | Standard |
DESCRIPTION
BS EN ISO 25178-603:2013
This standard BS EN ISO 25178-603:2013 Geometrical product specifications (GPS). Surface texture: Areal is classified in these ICS categories:
- 17.040.20 Properties of surfaces
- 17.040.40 Geometrical Product Specification (GPS)
This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometric (PSI) profile and areal surface texture measuring microscopes.