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immediate downloadReleased: 2020-07-22
BS IEC 62047-28:2017
Semiconductor devices. Micro-electromechanical devices Performance testing method of vibration-driven MEMS electret energy harvesting devices
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| Standard number: | BS IEC 62047-28:2017 |
| Pages: | 20 |
| Released: | 2020-07-22 |
| ISBN: | 978 0 580 90198 0 |
| Status: | Standard |
DESCRIPTION
BS IEC 62047-28:2017
This standard BS IEC 62047-28:2017 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices
This document applies to vibration driven electret energy harvesting devices whose electrodes with a gap below 1 000 ?m are covered by dielectric material with trapped charges and are fabricated by MEMS processes such as etching, photolithography or deposition.