Semiconductor devices. Micro-electromechanical devices Test methods for MEMS piezoresistive pressure-sensitive device on wafer
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Standard number:
BS IEC 62047-34:2019
Pages:
20
Released:
2019-04-16
ISBN:
978 0 580 97391 8
Status:
Standard
DESCRIPTION
BS IEC 62047-34:2019
This standard BS IEC 62047-34:2019 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:
31.140 Piezoelectric devices
31.080.99 Other semiconductor devices
IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.
