BS IEC 62047-47:2024 - Semiconductor Devices. Micro-electromechanical Devices Silicon Based MEMS Fabrication Technology. Measurement Method of Bending Strength of Microstructures

Standard Number: BS IEC 62047-47:2024

Pages: 20

Released: 2024-08-28

ISBN: 978 0 539 21851 0

Status: Standard

Overview

The BS IEC 62047-47:2024 standard is a crucial document for professionals in the semiconductor and micro-electromechanical systems (MEMS) industries. This standard provides comprehensive guidelines and methodologies for the fabrication technology of silicon-based MEMS and the measurement of the bending strength of microstructures. Released on August 28, 2024, this 20-page document is an essential resource for ensuring the reliability and performance of MEMS devices.

Key Features

• Comprehensive Guidelines: The standard offers detailed instructions on the fabrication technology of silicon-based MEMS, ensuring that all processes adhere to the highest quality and performance standards.
• Measurement Methodology: It provides a precise method for measuring the bending strength of microstructures, which is critical for assessing the durability and reliability of MEMS devices.
• Industry Relevance: This standard is relevant to a wide range of applications in the semiconductor industry, including sensors, actuators, and other micro-electromechanical devices.
• Up-to-Date Information: As a 2024 release, this standard includes the latest advancements and best practices in MEMS fabrication technology.

Why This Standard is Important

Micro-electromechanical systems (MEMS) are integral to modern technology, playing a vital role in various applications such as automotive sensors, medical devices, and consumer electronics. The BS IEC 62047-47:2024 standard ensures that these devices are manufactured to the highest standards, providing reliable performance and longevity. By following the guidelines and methodologies outlined in this standard, manufacturers can produce MEMS devices that meet stringent quality and performance criteria.

Detailed Content

This 20-page standard is meticulously structured to cover all aspects of silicon-based MEMS fabrication technology and the measurement of bending strength of microstructures. Key sections include:

• Introduction: An overview of the importance of MEMS and the need for standardized fabrication and measurement methods.
• Fabrication Technology: Detailed guidelines on the processes and techniques used in the fabrication of silicon-based MEMS.
• Measurement Methodology: Step-by-step instructions for measuring the bending strength of microstructures, including the equipment and procedures required.
• Quality Assurance: Best practices for ensuring the quality and reliability of MEMS devices throughout the fabrication process.
• Appendices: Additional resources and references for further reading and understanding.

Who Should Use This Standard?

The BS IEC 62047-47:2024 standard is designed for a wide range of professionals in the semiconductor and MEMS industries, including:

• Engineers: Those involved in the design, fabrication, and testing of MEMS devices will find this standard invaluable for ensuring their products meet industry standards.
• Quality Assurance Professionals: QA teams can use the guidelines and methodologies in this standard to implement rigorous testing and quality control processes.
• Researchers: Academics and industry researchers working on MEMS technology can use this standard as a reference for best practices and methodologies.
• Manufacturers: Companies involved in the production of MEMS devices can ensure their products meet the highest standards of quality and performance by adhering to this standard.

Conclusion

The BS IEC 62047-47:2024 standard is an essential resource for anyone involved in the semiconductor and MEMS industries. By providing comprehensive guidelines and methodologies for the fabrication and measurement of silicon-based MEMS, this standard ensures that devices are manufactured to the highest standards of quality and performance. Whether you are an engineer, quality assurance professional, researcher, or manufacturer, this standard will help you achieve excellence in your work and contribute to the advancement of MEMS technology.

BS IEC 62047-47:2024

This standard BS IEC 62047-47:2024 Semiconductor devices. Micro-electromechanical devices is classified in these ICS categories:

• 31.080.99 Other semiconductor devices