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immediate downloadReleased: 2022-09-07
BS IEC 63068-4:2022
Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices Procedure for identifying and evaluating defects using a combined method of optical inspection and photoluminescence
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Standard number: | BS IEC 63068-4:2022 |
Pages: | 28 |
Released: | 2022-09-07 |
ISBN: | 978 0 539 18417 4 |
Status: | Standard |
DESCRIPTION
BS IEC 63068-4:2022
This standard BS IEC 63068-4:2022 Semiconductor devices. Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices is classified in these ICS categories:
- 31.080.99 Other semiconductor devices