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immediate downloadReleased: 2013-10-31
BS ISO 13424:2013
Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis
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| Standard number: | BS ISO 13424:2013 |
| Pages: | 58 |
| Released: | 2013-10-31 |
| ISBN: | 978 0 580 68394 7 |
| Status: | Standard |
DESCRIPTION
BS ISO 13424:2013
This standard BS ISO 13424:2013 Surface chemical analysis. X-ray photoelectron spectroscopy. Reporting of results of thin-film analysis is classified in these ICS categories:
- 71.040.40 Chemical analysis
This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.