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immediate downloadReleased: 2006-11-30
BS ISO 18516:2006
Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution
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| Standard number: | BS ISO 18516:2006 |
| Pages: | 34 |
| Released: | 2006-11-30 |
| ISBN: | 0 580 49610 4 |
| Status: | Standard |
DESCRIPTION
BS ISO 18516:2006
This standard BS ISO 18516:2006 Surface chemical analysis. Auger electron spectroscopy and X-ray photoelectron spectroscopy. Determination of lateral resolution is classified in these ICS categories:
- 71.040.40 Chemical analysis
This International Standard describes three methods for measuring the lateral resolution achievable in Auger electron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edge method is suitable for instruments where the lateral resolution is expected to be larger than 1 µm. The grid method is suitable if the lateral resolution is expected to be less than 1 µm but more than 20 nm. The gold-island method is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.
Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.