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BS EN 62047-14:2012
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Semiconductor devices. Micro-electromechanical devices Forming limit measuring method of metallic film materials
Released: 2012-05-31
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178.50 EUR
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17.85 EUR
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Reading the standardfor 24 hours
53.55 EUR
English Hardcopy
In stock
178.50 EUR
BS EN 62047-15:2015
Semiconductor devices. Micro-electromechanical devices Test method of bonding strength between PDMS and glass
Semiconductor devices. Micro-electromechanical devices Test method of bonding strength between PDMS and glass
Released: 2015-07-31
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178.50 EUR
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17.85 EUR
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Reading the standardfor 24 hours
53.55 EUR
English Hardcopy
In stock
178.50 EUR
English Secure PDF
Immediate download
178.50 EUR
You can read the standard for 1 hour. More information in the category: E-reading
Reading the standardfor 1 hour
17.85 EUR
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53.55 EUR
English Hardcopy
In stock
178.50 EUR
BS EN 62047-17:2015
Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films
Semiconductor devices. Micro-electromechanical devices Bulge test method for measuring mechanical properties of thin films
Released: 2015-07-31
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290.36 EUR
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29.04 EUR
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87.11 EUR
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290.36 EUR
BS EN 62047-18:2013
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Semiconductor devices. Micro-electromechanical devices Bend testing methods of thin film materials
Released: 2013-10-31
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178.50 EUR
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17.85 EUR
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53.55 EUR
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178.50 EUR
BS EN 62047-19:2013
Semiconductor devices. Micro-electromechanical devices Electronic compasses
Semiconductor devices. Micro-electromechanical devices Electronic compasses
Released: 2013-10-31
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290.36 EUR
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29.04 EUR
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87.11 EUR
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290.36 EUR
BS EN 62047-1:2016
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Released: 2016-04-30
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290.36 EUR
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29.04 EUR
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87.11 EUR
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290.36 EUR
BS EN 62047-20:2014
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Released: 2014-10-31
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345.10 EUR
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34.51 EUR
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103.53 EUR
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345.10 EUR
BS EN 62047-21:2014
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Released: 2014-10-31
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178.50 EUR
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17.85 EUR
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53.55 EUR
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178.50 EUR
BS EN 62047-22:2014
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Released: 2014-10-31
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149.94 EUR
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14.99 EUR
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Reading the standardfor 24 hours
44.98 EUR
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149.94 EUR
English Secure PDF
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247.52 EUR
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24.75 EUR
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Reading the standardfor 24 hours
74.26 EUR
English Hardcopy
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247.52 EUR
BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Released: 2016-05-31
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290.36 EUR
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29.04 EUR
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87.11 EUR
English Hardcopy
In stock
290.36 EUR