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Released: 01.04.2015
CSN EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
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English Hardcopy
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Number of Standard: | CSN EN 62047-21 |
Category: | 358775 |
Pages: | 24 |
Released: | 01.04.2015 |
Catalog number: | 97102 |
DESCRIPTION
CSN EN 62047-21
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.