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Released: 01.04.2023
CSN EN ISO 23131 - Ellipsometry - Principles

CSN EN ISO 23131

Ellipsometry - Principles

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Number of Standard:CSN EN ISO 23131
Category:039050
Pages:28
Released:01.04.2023
Catalog number:516600
DESCRIPTION

CSN EN ISO 23131

CSN EN ISO 23131 This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
Original English text of CSN EN Standard.
The price of the Standard included all amendments and correcturs.