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CSN EN 62047-12
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Semiconductor devices - Micro-electromechanical devices - Part 12: Bending fatigue testing method of thin film materials using resonant vibration of MEMS structures
Released: 01.04.2012
English Hardcopy
In stock
84.00 EUR
CSN EN 62047-13
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
Semiconductor devices - Micro-electromechanical devices - Part 13: Bend- and shear- type test methods of measuring adhesive strength for MEMS structures
Released: 01.10.2012
English Hardcopy
In stock
61.00 EUR
CSN EN 62047-14
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
Semiconductor devices - Micro-electromechanical devices - Part 14: Forming limit measuring method of metallic film materials
Released: 01.10.2012
English Hardcopy
In stock
61.00 EUR
English Hardcopy
In stock
52.00 EUR
CSN EN 62047-17
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films
Released: 01.09.2015
English Hardcopy
In stock
69.00 EUR
CSN EN 62047-18
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
Semiconductor devices - Micro-electromechanical devices - Part 18: Bend testing methods of thin film materials
Released: 01.04.2014
English Hardcopy
In stock
61.00 EUR
CSN EN 62047-19
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
Semiconductor devices - Micro-electromechanical devices - Part 19: Electronic compasses
Released: 01.04.2014
English Hardcopy
In stock
84.00 EUR
CSN EN 62047-2
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
Released: 01.05.2007
English Hardcopy
In stock
69.00 EUR
CSN EN 62047-20
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
Semiconductor devices - Micro-electromechanical devices - Part 20: Gyroscopes
Released: 01.04.2015
English Hardcopy
In stock
98.00 EUR
CSN EN 62047-21
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices - Micro-electromechanical devices - Part 21: Test method for Poisson's ratio of thin film MEMS materials
Released: 01.04.2015
English Hardcopy
In stock
61.00 EUR
CSN EN 62047-22
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
Semiconductor devices - Micro-electromechanical devices - Part 22: Electromechanical tensile test method for conductive thin films on flexible substrates
Released: 01.04.2015
English Hardcopy
In stock
61.00 EUR
English Hardcopy
In stock
69.00 EUR