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download between 0-24 hoursReleased: 2016-01-06
IEC 62047-1:2016
Semiconductor devices - Micro-electromechanical devices - Part 1: Terms and definitions
Dispositifs à semiconducteurs - Dispositifs microélectromécaniques - Partie 1: Termes et définitions
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Standard number: | IEC 62047-1:2016 |
Released: | 2016-01-06 |
Language: | English/French - Bilingual |
DESCRIPTION
IEC 62047-1:2016
IEC 62047-1:2016 defines terms for micro-electromechanical devices including the process of production of such devices. This edition includes the following significant technical changes with respect to the previous edition: a) removal of ten terms; b) revision of twelve terms; c) addition of sixteen new terms.