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Homepage>IEC Standards>IEC 62047-34:2019 - Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer
download between 0-24 hoursReleased: 2019-04-05
IEC 62047-34:2019 - Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

IEC 62047-34:2019

Semiconductor devices - Micro-electromechanical devices - Part 34: Test methods for MEMS piezoresistive pressure-sensitive device on wafer

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Standard number:IEC 62047-34:2019
Released:2019-04-05
Language:English
DESCRIPTION

IEC 62047-34:2019

IEC 62047-34:2019 (E) describes test conditions and test methods of electric character, static performances and thermal performances for MEMS pressure-sensitive devices. This document applies to test for both open and closed loop piezoresistive MEMS pressure devices on wafer.

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