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Homepage>ISO Standards>ISO 13424:2013-Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis
download between 0-24 hoursReleased: 2013
ISO 13424:2013-Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

ISO 13424:2013

ISO 13424:2013-Surface chemical analysis — X-ray photoelectron spectroscopy — Reporting of results of thin-film analysis

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Standard´s number:ISO 13424:2013
Pages:46
Edition:1
Released:2013
Language:English
DESCRIPTION

ISO 13424:2013


ISO 13424:2013 specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.
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