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ISO 18115-3:2022
ISO 18115-3:2022-Surface chemical analysis — Vocabulary-Part 3: Terms used in optical interface analysis
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Standard´s number: | ISO 18115-3:2022 |
Pages: | 35 |
Edition: | 1 |
Released: | 2022 |
Language: | English |
DESCRIPTION
ISO 18115-3:2022
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.