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ISO 22493:2014
ISO 22493:2014-Microbeam analysis — Scanning electron microscopy — Vocabulary
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Standard´s number: | ISO 22493:2014 |
Pages: | 20 |
Edition: | 2 |
Released: | 2014 |
Language: | English |
DESCRIPTION
ISO 22493:2014
ISO 22493:2014 defines terms used in the practice of scanning electron microscopy (SEM). It covers both general and specific concepts, classified according to their hierarchy in a systematic order, with those terms that have already been defined in ISO 23833 also included, where appropriate. ISO 22493:2014is applicable to all standardization documents relevant to the practice of SEM. In addition, some clauses of ISO 22493:2014 are applicable to documents relevant to related fields (e.g. EPMA, AEM, EDS) for the definition of terms which are relevant to such fields.