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Homepage>ISO Standards>ISO 25178-603:2025-Geometrical product specifications (GPS) — Surface texture: Areal-Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments
download between 0-24 hoursReleased: 2025
ISO 25178-603:2025-Geometrical product specifications (GPS) — Surface texture: Areal-Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

ISO 25178-603:2025

ISO 25178-603:2025-Geometrical product specifications (GPS) — Surface texture: Areal-Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments

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Standard´s number:ISO 25178-603:2025
Pages:18
Edition:2
Released:2025
DESCRIPTION

ISO 25178-603:2025


This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
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