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download between 0-24 hoursReleased: 2025
ISO 25178-604:2025
ISO 25178-604:2025-Geometrical product specifications (GPS) — Surface texture: Areal-Part 604: Design and characteristics of non-contact (coherence scanning interferometry) instruments
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| Standard´s number: | ISO 25178-604:2025 |
| Pages: | 23 |
| Edition: | 2 |
| Released: | 2025 |
DESCRIPTION
ISO 25178-604:2025
This document specifies the design and metrological characteristics of coherence scanning interferometry (CSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from surface topography data, the methods described in this document are also applicable to profiling measurements.