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immediate downloadReleased: 2013-03-31
PD ISO/TR 19319:2013
Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods
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| Standard number: | PD ISO/TR 19319:2013 |
| Pages: | 126 |
| Released: | 2013-03-31 |
| ISBN: | 978 0 580 71186 2 |
| Status: | Standard |
DESCRIPTION
PD ISO/TR 19319:2013
This standard PD ISO/TR 19319:2013 Surface chemical analysis. Fundamental approaches to determination of lateral resolution and sharpness in beam-based methods is classified in these ICS categories:
- 71.040.40 Chemical analysis
This Technical Report describes:
Functions and their relevance to lateral resolution:
Point spread function (PSF) — see 4.1.1
Line spread function (LSF) — see 4.1.2
Edge spread function (ESF) — see 4.1.3
Modulation transfer function (MTF) — see 4.1.4
Contrast transfer function (CTF) — see 4.1.5.
Experimental methods for the determination of lateral resolution and parameters related to lateral resolution:
Imaging of a narrow stripe — see 4.2
Imaging of a sharp edge — see 4.3
Imaging of square-wave gratings — see 4.4.
Physical factors affecting lateral resolution, analysis area and sample area viewed by the analyser in Auger electron spectroscopy and X-ray photoelectron spectroscopy — see Clauses 5 and 6.