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BS EN 62047-1:2016
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Semiconductor devices. Micro-electromechanical devices Terms and definitions
Released: 2016-04-30
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285.48 EUR
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28.55 EUR
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85.64 EUR
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285.48 EUR
BS EN 62047-20:2014
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Semiconductor devices. Micro-electromechanical devices Gyroscopes
Released: 2014-10-31
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339.30 EUR
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33.93 EUR
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101.79 EUR
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339.30 EUR
BS EN 62047-21:2014
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Semiconductor devices. Micro-electromechanical devices Test method for Poisson's ratio of thin film MEMS materials
Released: 2014-10-31
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175.50 EUR
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17.55 EUR
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52.65 EUR
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175.50 EUR
BS EN 62047-22:2014
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Semiconductor devices. Micro-electromechanical devices Electromechanical tensile test method for conductive thin films on flexible substrates
Released: 2014-10-31
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147.42 EUR
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14.74 EUR
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44.23 EUR
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147.42 EUR
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243.36 EUR
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24.34 EUR
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73.01 EUR
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243.36 EUR
BS EN 62047-26:2016
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Semiconductor devices. Micro-electromechanical devices Description and measurement methods for micro trench and needle structures
Released: 2016-05-31
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28.55 EUR
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85.64 EUR
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BS EN 62047-2:2006
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
Semiconductor devices. Micro-electromechanical devices Tensile testing method of thin film materials
Released: 2006-11-30
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17.55 EUR
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52.65 EUR
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175.50 EUR
BS EN 62047-3:2006
Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing
Semiconductor devices. Micro-electromechanical devices Thin film standard test piece for tensile testing
Released: 2006-11-30
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147.42 EUR
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14.74 EUR
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44.23 EUR
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147.42 EUR
BS EN 62047-4:2010
Semiconductor devices. Micro-electromechanical devices Generic specification for MEMS
Semiconductor devices. Micro-electromechanical devices Generic specification for MEMS
Released: 2010-11-30
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243.36 EUR
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73.01 EUR
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BS EN 62047-5:2011
Semiconductor devices. Micro-electromechanical devices RF MEMS switches
Semiconductor devices. Micro-electromechanical devices RF MEMS switches
Released: 2013-04-30
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285.48 EUR
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28.55 EUR
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85.64 EUR
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BS EN 62047-6:2010
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Semiconductor devices. Micro-electromechanical devices Axial fatigue testing methods of thin film materials
Released: 2010-04-30
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17.55 EUR
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52.65 EUR
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BS EN 62047-7:2011
Semiconductor devices. Micro-electromechanical devices MEMS BAW filter and duplexer for radio frequency control and selection
Semiconductor devices. Micro-electromechanical devices MEMS BAW filter and duplexer for radio frequency control and selection
Released: 2011-08-31
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285.48 EUR
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28.55 EUR
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85.64 EUR
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285.48 EUR