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in stockReleased: 2013-11-01
UNE EN 62047-11:2013
Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.)
Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 11: Método de ensayo para coeficientes de expansión térmica lineales de materiales MEMS independientes (Ratificada por AENOR en noviembre de 2013.)
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| Standard number: | UNE EN 62047-11:2013 |
| Pages: | 23 |
| Released: | 2013-11-01 |
| Status: | Standard |
DESCRIPTION
This standard UNE EN 62047-11:2013 Semiconductor devices - Micro-electromechanical devices - Part 11: Test method for coefficients of linear thermal expansion of free-standing materials for micro-electromechanical systems (Endorsed by AENOR in November of 2013.) is classified in these ICS categories:
- 31.080.99