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Homepage>UNE standards>UNE EN 62047-17:2015 Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)
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in stockReleased: 2015-08-01
UNE EN 62047-17:2015 Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)

UNE EN 62047-17:2015

Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.)

Dispositivos semiconductores. Dispositivos microelectromecánicos. Parte 17: Método de ensayo de bulto para medir las propiedades mecánicas de las películas finas (Ratificada por AENOR en agosto de 2015.)

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Standard number:UNE EN 62047-17:2015
Pages:31
Released:2015-08-01
Status:Standard
DESCRIPTION

This standard UNE EN 62047-17:2015 Semiconductor devices - Micro-electromechanical devices - Part 17: Bulge test method for measuring mechanical properties of thin films (Endorsed by AENOR in August of 2015.) is classified in these ICS categories:

  • 31.080.99