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in stockReleased: 2011-02-01
UNE EN 62047-4:2010
Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.)
Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Especificaciones generales para MEMS. (Ratificada por AENOR en febrero de 2011.)
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Standard number: | UNE EN 62047-4:2010 |
Pages: | 23 |
Released: | 2011-02-01 |
Status: | Standard |
DESCRIPTION
This standard UNE EN 62047-4:2010 Semiconductor devices - Micro-electromechanical devices -- Part 4: Generic specification for MEMS (Endorsed by AENOR in February of 2011.) is classified in these ICS categories:
- 31.080.99