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Homepage>UNE standards>UNE EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)
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in stockReleased: 2010-06-01
UNE EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)

UNE EN 62047-6:2010

Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.)

Dispositivos semiconductores. Dispositivos micro-electromecánicos. Parte 4: Métodos de ensayo de la fatiga axial de los materiales de película. (Ratificada por AENOR en junio de 2010.)

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Standard number:UNE EN 62047-6:2010
Pages:19
Released:2010-06-01
Status:Standard
DESCRIPTION

This standard UNE EN 62047-6:2010 Semiconductor devices - Micro-electromechanical devices -- Part 6: Axial fatigue testing methods of thin film materials (Endorsed by AENOR in June of 2010.) is classified in these ICS categories:

  • 31.080.99